Hermeticity Testing of MEMS and Microelectronic Packages
ISBN: 9781608075287
Platform/Publisher: Ebook Central / Artech House
Digital rights: Users: Unlimited; Printing: Limited; Download: 7 Days at a Time
Subjects: Engineering: Electrical; Engineering;

"Packaging of microelectronics has been developing since the invention of the transistor in 1947. With the increasing complexity and decreasing size of the die, packaging requirements have continued to change. A step change in package requirements came with the introduction of the Micro-Electro-Mechanical System (MEMS) whereby interactions with the external environment are, in some cases, required. This resource is a rapid, definitive reference on hermetic packaging for the MEMS and microelectronics industry, giving practical guidance on traditional and newly developed test methods. This book includes up-to-date and applicable test methods for today's package types. The authors cover the history and development of packaging, along with a view to understanding initial hermeticity testing requirements and the subsequent limitations of these methods when applied to new package types."


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