Electromechanics and MEMS
ISBN: 9781139032605
Platform/Publisher: Cambridge Core / Cambridge University Press
Digital rights: Users: Unlimited; Printing: Unlimited; Download: Unlimited
Subjects: Science and Engineering; Engineering; Electronic Optoelectronic Devices and Nanotechnology Solid Mechanics and Materials;

Offering a consistent, systematic approach to capacitive, piezoelectric and magnetic MEMS, from basic electromechanical transducers to high-level models for sensors and actuators, this comprehensive textbook equips graduate and senior-level undergraduate students with all the resources necessary to design and develop practical, system-level MEMS models. The concise yet thorough treatment of the underlying principles of electromechanical transduction provides a solid theoretical framework for this development, with each new topic related back to the core concepts. Repeated references to the shared commonalities of all MEMS encourage students to develop a systems-based design perspective. Extensive use is made of easy-to-interpret electrical and mechanical analogs, such as electrical circuits, electromechanical two-port models and the cascade paradigm. Each chapter features worked examples and numerous problems, all designed to test and extend students' understanding of the key principles.


hidden image for function call